Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9863393 | Waste heat controller | Takashi Senda, Mitsuo Hara, Takanobu Kawano | 2018-01-09 |
| 9163590 | Vaporized-fuel processing system | Hiroshi Katsurahara, Mitsuyuki Kobayashi | 2015-10-20 |
| 8612117 | Apparatus for controlling the amount of waste heat of an engine | Takashi Senda, Mitsuo Hara, Daisuke NAKANISHI, Hisashi Iida | 2013-12-17 |
| 8402757 | Waste heat control apparatus | Mitsuo Hara, Daisuke NAKANISHI, Hisashi Iida, Koichi Ban | 2013-03-26 |
| 7518717 | Exposure apparatus and a device manufacturing method using the same | — | 2009-04-14 |
| 7339662 | Exposure apparatus and a device manufacturing method using the same | — | 2008-03-04 |
| 7199878 | Scan exposure apparatus and method, and device manufacturing method | — | 2007-04-03 |
| 6970244 | Scan exposure apparatus and method, and device manufacturing method | — | 2005-11-29 |
| 6897949 | Exposure apparatus and a device manufacturing method using the same | — | 2005-05-24 |
| 6859265 | Stage device, method of controlling same, and exposure apparatus | — | 2005-02-22 |
| 6630986 | Scanning type exposure apparatus and a device manufacturing method using the same | Mitsuru Inoue | 2003-10-07 |
| 6573976 | Exposure apparatus, exposure method, and semiconductor device manufacturing method | — | 2003-06-03 |
| 6462828 | Exposure apparatus | — | 2002-10-08 |
| 6456374 | Exposure apparatus and a device manufacturing method using the same | — | 2002-09-24 |
| 6411365 | Exposure method and exposure apparatus | — | 2002-06-25 |
| 6256085 | Exposure apparatus | — | 2001-07-03 |
| 5945769 | Wave driven motor | Reiji Mitarai | 1999-08-31 |
| 5933215 | Exposure apparatus and device manufacturing method using the same | Mitsuru Inoue, Ryuichi Ebinuma, Kazunori Iwamoto, Eiji Osanai | 1999-08-03 |
| 5874799 | Control device for a vibration driven motor | Reiji Mitarai | 1999-02-23 |
| 5841215 | Control apparatus for vibration wave motor | — | 1998-11-24 |
| 5757149 | Drive control apparatus | Mikio Sato | 1998-05-26 |
| 5736822 | Vibration wave motor | Reiji Mitarai, Isao Iwai | 1998-04-07 |
| 5691614 | Servo system adjusting method and servo control system | — | 1997-11-25 |
| 5625310 | Signal processing apparatus and displacement detecting apparatus using the same | — | 1997-04-29 |
| 5625551 | Feedback controller | Reiji Mitarai, Isao Iwai | 1997-04-29 |