Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9678444 | Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article | — | 2017-06-13 |
| 9052614 | Vibration control apparatus, lithography apparatus, and method of manufacturing article | Ryo Nawata | 2015-06-09 |
| 7859643 | Apparatus for moving curved-surface mirror, exposure apparatus and device manufacturing method | — | 2010-12-28 |
| 7771065 | Optical unit and exposure apparatus having the same | Choshoku Sai, Shigeo Sakino, Hirohito Ito, Shinji Uchida | 2010-08-10 |
| 7453623 | Reflecting mirror and exposure apparatus using the same | Shinji Uchida, Choshoku Sai, Hirohito Ito, Shigeo Sakino | 2008-11-18 |
| 7443619 | Optical element holding apparatus, exposure apparatus and device manufacturing method | Shigeo Sakino, Hirohito Ito, Shinji Uchida, Choshoku Sai | 2008-10-28 |
| 7297981 | Electro-optical device having a light-shielding film comprising alternating layers of silicide and nitrided silicide | Yuichi Shimizu | 2007-11-20 |
| 7224432 | Stage device, exposure apparatus, and device manufacturing method | Yasuhito Sasaki, Yoshikazu Miyajima, Hitoshi Sato, Hideo Tanaka | 2007-05-29 |
| 5909272 | Stage and exposure apparatus using same | Eiji Osanai, Mitsuru Inoue, Kazunori Iwamoto, Hiroshi Ito | 1999-06-01 |
| 5511930 | Precision positioning apparatus | Mikio Sato, Shinji Wakui | 1996-04-30 |
| 5504407 | Stage driving system | Shinji Wakui, Mikio Sato | 1996-04-02 |