Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10495978 | Projection optical system, exposure apparatus, and device manufacturing method | Mitsuru Seki, Takeshi Nakajima | 2019-12-03 |
| 9944576 | Method for separating straight-chain conjugated diene | Masahiko Matsukata, Motomu Sakai, Tatsuo Hamamatsu, Nobuhiro Kimura | 2018-04-17 |
| 8891054 | Stage device including a heat insulating sheet supported by an auxiliary member | Hitoshi Sato, Keiji Emoto | 2014-11-18 |
| 8102500 | Stage device, exposure apparatus, and microdevice manufacturing method | Hitoshi Sato, Keiji Emoto | 2012-01-24 |
| 7408276 | Plane motor device with surrounding member surrounding coil unit and with cooling channel provided within surrounding member | Hitoshi Sato, Yoshikazu Miyajima | 2008-08-05 |
| 7391495 | Stage apparatus, exposure system using the same, and device manufacturing method | Yoshikazu Miyajima, Hitoshi Sato | 2008-06-24 |
| 7321418 | Stage apparatus, exposure apparatus, and device manufacturing method | Yoshikazu Miyajima, Naosuke Nishimura, Hideo Tanaka, Toshihiko Nishida | 2008-01-22 |
| 7312848 | Positioning apparatus, exposure apparatus, and device manufacturing method | Hideo Tanaka, Yoshikazu Miyajima | 2007-12-25 |
| 7301602 | Stage apparatus and exposure apparatus | Hitoshi Sato, Yoshikazu Miyajima | 2007-11-27 |
| 7224432 | Stage device, exposure apparatus, and device manufacturing method | Yoshikazu Miyajima, Hitoshi Sato, Katsumi Asada, Hideo Tanaka | 2007-05-29 |
| 5619495 | Cell switching apparatus and a cell switching system | Hideaki Yamanaka, Hirotaka SAITO, Munenori Tsuzuki, Hirotoshi Yamada, Kazuyoshi Oshima | 1997-04-08 |
| 4671458 | Air conditioning apparatus | Norisuke Fukuda, Fumio Watanabe | 1987-06-09 |