Issued Patents All Time
Showing 1–25 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12326666 | Exposing apparatus and method for manufacturing article | Takashi Hayakawa | 2025-06-10 |
| 12216410 | Exposure apparatus and method of manufacturing article | Mamoru Kaneishi | 2025-02-04 |
| 11762299 | Exposure apparatus and method of manufacturing article | Mamoru Kaneishi | 2023-09-19 |
| 11036149 | Imprint apparatus, method of operating the same, and method of manufacturing article | Yoichi Matsuoka, Kiyohito Yamamoto, Hisanobu Azuma, Shigeru Terashima, Toshihiro Maeda +2 more | 2021-06-15 |
| 10564541 | Pattern formation method and article manufacturing method | Tatsuya Hayashi | 2020-02-18 |
| 10303069 | Pattern forming method and method of manufacturing article | Eiji Sakamoto, Yutaka Watanabe | 2019-05-28 |
| 10241424 | Imprint apparatus, imprint method, and article manufacturing method | Tosiya Asano | 2019-03-26 |
| 10105892 | Imprint apparatus and imprint method, and article manufacturing method | Kazuki Nakagawa | 2018-10-23 |
| 9435642 | Position measuring apparatus, pattern transfer apparatus, and method for manufacturing a device | Naoki Maruyama | 2016-09-06 |
| 9217937 | Interferometric measurement of rotation of stage apparatus and adjustment method thereof, exposure apparatus and method of manufacturing device | Zenichi Hamaya, Ryo Takai, Shinichiro Hirai | 2015-12-22 |
| 9158211 | Exposure apparatus and method of manufacturing device | Tomohiro Harayama | 2015-10-13 |
| 9132458 | Processing machine system and method of positioning processing machines | Tetsuji Okada, Noriyasu Hasegawa | 2015-09-15 |
| 9104121 | Exposure apparatus having a vibration suppressing feature and method of manufacturing device using the exposure apparatus | Tosiya Asano | 2015-08-11 |
| 8956143 | Lithography system and lithography method | Mitsuhiro Furumoto | 2015-02-17 |
| 8915479 | Anti-vibration apparatus | Mitsuhiro Furumoto, Tosiya Asano | 2014-12-23 |
| 8891054 | Stage device including a heat insulating sheet supported by an auxiliary member | Hitoshi Sato, Yasuhito Sasaki | 2014-11-18 |
| 8102500 | Stage device, exposure apparatus, and microdevice manufacturing method | Hitoshi Sato, Yasuhito Sasaki | 2012-01-24 |
| 7982849 | Exposure apparatus | — | 2011-07-19 |
| 7978304 | Processing apparatus for processing object in vessel | — | 2011-07-12 |
| 7733625 | Substrate holding system and exposure apparatus using the same | Atsushi Ito | 2010-06-08 |
| 7705969 | Exposure apparatus | — | 2010-04-27 |
| 7660098 | Substrate holding system and exposure apparatus using the same | Atsushi Ito | 2010-02-09 |
| 7557469 | Positioning system and linear motor | — | 2009-07-07 |
| 7518708 | Liquid-immersion exposure method and liquid-immersion exposure apparatus | — | 2009-04-14 |
| 7508646 | Substrate holding technique | Atsushi Ito | 2009-03-24 |