Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11747722 | Imprint method, imprint apparatus, and method of manufacturing article | Masahiro Tamura, Yoshinari Someya | 2023-09-05 |
| 11314167 | Imprint apparatus, imprint method, and method for manufacturing article | Yosuke Murakami | 2022-04-26 |
| 10095117 | Imprint apparatus | Noriyasu Hasegawa, Setsuo Yoshida, Yoshihiro Shiode | 2018-10-09 |
| 9804510 | Interferometer system, lithography apparatus, and article manufacturing method | Ryo Takai, Shinichiro Hirai, Takeshi Rokukawa, Takashi Miura | 2017-10-31 |
| 9400426 | Imprint apparatus | Noriyasu Hasegawa, Setsuo Yoshida, Yoshihiro Shiode | 2016-07-26 |
| 9285675 | Imprint apparatus | Noriyasu Hasegawa, Setsuo Yoshida, Yoshihiro Shiode | 2016-03-15 |
| 9217937 | Interferometric measurement of rotation of stage apparatus and adjustment method thereof, exposure apparatus and method of manufacturing device | Keiji Emoto, Ryo Takai, Shinichiro Hirai | 2015-12-22 |
| 7646488 | Positioning apparatus, exposure apparatus, and device manufacturing method | — | 2010-01-12 |