YS

Yoshihiro Shiode

Canon: 25 patents #2,400 of 19,416Top 15%
Overall (All Time): #159,775 of 4,157,543Top 4%
25
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
12399425 Molding apparatus and article manufacturing method 2025-08-26
11759994 Imprint apparatus, imprint method, and article manufacturing method 2023-09-19
11413651 Imprint apparatus, operation method of imprint apparatus, and article manufacturing method 2022-08-16
11400619 Imprint method and article manufacturing method 2022-08-02
10828808 Imprint apparatus, imprint method, and method of manufacturing article 2020-11-10
10705422 Imprint method 2020-07-07
10095117 Imprint apparatus Zenichi Hamaya, Noriyasu Hasegawa, Setsuo Yoshida 2018-10-09
9921470 Imprint method for an imprint apparatus which transfers a pattern onto a substrate by using a mold 2018-03-20
9798231 Imprint apparatus and method of manufacturing article 2017-10-24
9400426 Imprint apparatus Zenichi Hamaya, Noriyasu Hasegawa, Setsuo Yoshida 2016-07-26
9283720 Position detection apparatus, imprint apparatus, and position detection method Ken Minoda, Kazuhiko Mishima, Hironori Maeda 2016-03-15
9285675 Imprint apparatus Zenichi Hamaya, Noriyasu Hasegawa, Setsuo Yoshida 2016-03-15
8842294 Position detection apparatus, imprint apparatus, and position detection method Ken Minoda, Kazuhiko Mishima, Hironori Maeda 2014-09-23
8678808 Imprint apparatus and article manufacturing method Setsuo Yoshida, Noriyasu Hasegawa, Tatsuya Hayashi 2014-03-25
7826044 Measurement method and apparatus, and exposure apparatus 2010-11-02
7499179 Measurement method and apparatus, exposure apparatus, exposure method, and adjusting method 2009-03-03
7468798 System and method for polarization characteristic measurement of optical systems via centroid analysis 2008-12-23
7423740 Reticle and optical characteristic measuring method 2008-09-09
7375805 Reticle and optical characteristic measuring method 2008-05-20
7221434 Exposure method and apparatus Seiya Miura 2007-05-22
7193713 Method and apparatus for measuring optical characteristic, and projection exposure apparatus using the same 2007-03-20
7190443 Reticle and optical characteristic measuring method 2007-03-13
6982786 Reticle and optical characteristic measuring method 2006-01-03
6960415 Aberration measuring method and projection exposure apparatus 2005-11-01
6633390 Focus measurement in projection exposure apparatus Izumi Tsukamoto, Hiroshi Morohoshi, Yoshio Kawanobe 2003-10-14