Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D705276 | Cabin for work machine | Taiki Furuki, Teruhiko Iwamoto | 2014-05-20 |
| 7755740 | Exposure apparatus | Hideki Nogawa | 2010-07-13 |
| 6809802 | Substrate attracting and holding system for use in exposure apparatus | Itaru Fujita, Hideki Nogawa, Yukio Takabayashi | 2004-10-26 |
| 6762826 | Substrate attracting and holding system for use in exposure apparatus | Itaru Fujita, Hideki Nogawa, Yukio Takabayashi | 2004-07-13 |
| 6654096 | Exposure apparatus, and device manufacturing method | Itaru Fujita, Hideki Nogawa, Yukio Takabayashi | 2003-11-25 |
| 6633390 | Focus measurement in projection exposure apparatus | Yoshihiro Shiode, Hiroshi Morohoshi, Yoshio Kawanobe | 2003-10-14 |
| 5760879 | Method of detecting coma of projection optical system | Hirohiko Shinonaga, Hiroshi Morohoshi | 1998-06-02 |
| 4538914 | Transfer apparatus for compensating for a transfer error | Minoru Yomoda | 1985-09-03 |