Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6809798 | Stage control method, exposure method, exposure apparatus and device manufacturing method | — | 2004-10-26 |
| 6809802 | Substrate attracting and holding system for use in exposure apparatus | Izumi Tsukamoto, Hideki Nogawa, Yukio Takabayashi | 2004-10-26 |
| 6762826 | Substrate attracting and holding system for use in exposure apparatus | Izumi Tsukamoto, Hideki Nogawa, Yukio Takabayashi | 2004-07-13 |
| 6654096 | Exposure apparatus, and device manufacturing method | Izumi Tsukamoto, Hideki Nogawa, Yukio Takabayashi | 2003-11-25 |
| 4825247 | Projection exposure apparatus | Ryuichi Kemi, Kazuo Takahashi | 1989-04-25 |