Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4669842 | Projection optical device | Mitsugu Yamamura | 1987-06-02 |
| 4659227 | Alignment apparatus | Mitsuya Sato | 1987-04-21 |
| 4635373 | Wafer conveying apparatus with alignment mechanism | Makoto Miyazaki, Takehiko Suzuki | 1987-01-13 |
| 4600282 | Alignment apparatus | Mitsugu Yamamura | 1986-07-15 |
| 4538914 | Transfer apparatus for compensating for a transfer error | Izumi Tsukamoto | 1985-09-03 |