Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5365342 | Alignment and exposure apparatus and method for manufacture of integrated circuits | Naoki Ayata, Bunei Hamasaki, Masao Kosugi, Kazuo Takahashi, Mitsuaki Seki | 1994-11-15 |
| 5050111 | Alignment and exposure apparatus and method for manufacture of integrated circuits | Naoki Ayata, Bunei Hamasaki, Masao Kosugi, Kazuo Takahashi, Mitsuaki Seki | 1991-09-17 |
| 4937618 | Alignment and exposure apparatus and method for manufacture of integrated circuits | Naoki Ayata, Bunei Hamasaki, Masao Kosugi, Kazuo Takahashi, Mitsuaki Seki | 1990-06-26 |
| 4669842 | Projection optical device | Minoru Yomoda | 1987-06-02 |
| 4600282 | Alignment apparatus | Minoru Yomoda | 1986-07-15 |