Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12079551 | Simulation method, simulation apparatus, storage medium, film forming method, and method of producing cured product | Junichi Seki, Yuichiro Oguchi | 2024-09-03 |
| 11809089 | Control device, lithography apparatus, measurement apparatus, processing apparatus, planarizing apparatus, and article manufacturing method | Kota Nakano | 2023-11-07 |
| 11651118 | Simulation method, simulation apparatus, and storage medium | Junichi Seki, Yuichiro Oguchi | 2023-05-16 |
| 11460781 | Control device for generating a control deviation via machine learning | Kota Nakano | 2022-10-04 |
| 11314165 | Forming apparatus and method of manufacturing article | Setsuo Yoshida | 2022-04-26 |
| 10634994 | Imprint apparatus, imprint method, method of manufacturing article | — | 2020-04-28 |
| 10495989 | Imprint apparatus and method of manufacturing article | Takahiro Yoshida | 2019-12-03 |
| 10241424 | Imprint apparatus, imprint method, and article manufacturing method | Keiji Emoto | 2019-03-26 |
| 10011056 | Imprint apparatus and article manufacturing method | Tetsuji Okada, Noriyasu Hasegawa | 2018-07-03 |
| 9977346 | Lithography apparatus, and method of manufacturing article | Tetsuji Okada, Naoki Maruyama | 2018-05-22 |
| 9394966 | Vibration suppression apparatus and vibration suppression method | — | 2016-07-19 |
| 9104121 | Exposure apparatus having a vibration suppressing feature and method of manufacturing device using the exposure apparatus | Keiji Emoto | 2015-08-11 |
| 8970821 | Positioning apparatus, exposure apparatus and device manufacturing method | — | 2015-03-03 |
| 8915479 | Anti-vibration apparatus | Mitsuhiro Furumoto, Keiji Emoto | 2014-12-23 |
| 8786831 | Positioning apparatus | Yugo Shibata, Atsushi Kimura | 2014-07-22 |
| 8288972 | Stage device, method for controlling stage device, exposure apparatus using same, and device manufacturing method | — | 2012-10-16 |
| 8031328 | Positioning apparatus | Yugo Shibata, Atsushi Kimura | 2011-10-04 |
| 7737419 | Alignment apparatus, exposure apparatus, and device manufacturing method | — | 2010-06-15 |
| 7276866 | Moving control apparatus and moving control method | — | 2007-10-02 |
| 7154242 | Moving member mechanism and control method therefor | — | 2006-12-26 |
| 6442858 | Positioning apparatus, exposure apparatus, device manufacturing method, and positioning method | — | 2002-09-03 |
| 5917580 | Scan exposure method and apparatus | Ryuichi Ebinuma | 1999-06-29 |