Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9791018 | Vibration isolation apparatus, method of isolating vibration, lithography apparatus, and method of producing device | — | 2017-10-17 |
| 8786831 | Positioning apparatus | Tosiya Asano, Atsushi Kimura | 2014-07-22 |
| 8031328 | Positioning apparatus | Tosiya Asano, Atsushi Kimura | 2011-10-04 |
| 7932646 | Exposure apparatus with a stage, driving unit,and force applying unit having a separate magnetic shield | — | 2011-04-26 |
| 7880864 | Stage apparatus, exposure apparatus, and device manufacturing method | — | 2011-02-01 |
| 7804207 | Positioning apparatus, exposure apparatus, and device manufacturing method using repulsion force generation | — | 2010-09-28 |
| 7375346 | Positioning device and method of initializing a positioning device | — | 2008-05-20 |
| 7330093 | Alignment apparatus, exposure apparatus, and device manufacturing method | Toshiya Asano | 2008-02-12 |
| 7282874 | Alignment apparatus, exposure apparatus, and device manufacturing method | Atsushi Kimura | 2007-10-16 |
| 7193493 | Alignment apparatus, exposure apparatus, and device manufacturing method | Toshiya Asano | 2007-03-20 |
| 7157722 | Positioning device and method of initializing a positioning device | — | 2007-01-02 |