Issued Patents All Time
Showing 26–50 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7466531 | Substrate holding system and exposure apparatus using the same | Atsushi Ito | 2008-12-16 |
| 7392718 | Sample temperature adjusting system | — | 2008-07-01 |
| 7391496 | Exposure apparatus | Hirohide Matsuhisa, Kotaro Akutsu | 2008-06-24 |
| 7388307 | Stage apparatus, plane motor, and device manufacturing method | — | 2008-06-17 |
| 7292426 | Substrate holding system and exposure apparatus using the same | Atsushi Ito | 2007-11-06 |
| 7284906 | Exhaust apparatus and control method for same, and vacuum-use hydrostatic bearing | Katsunori Onuki | 2007-10-23 |
| 7282820 | Stage device and exposure apparatus | — | 2007-10-16 |
| 7282821 | Linear motor, stage apparatus, exposure apparatus, and device manufacturing apparatus | Hiroyoshi Kubo | 2007-10-16 |
| 7218020 | Linear motor, stage apparatus, exposure apparatus, and device manufacturing method | — | 2007-05-15 |
| 7177007 | Temperature adjustment apparatus, exposure apparatus having the temperature adjustment apparatus, and semiconductor device manufacturing method | — | 2007-02-13 |
| 7158232 | Substrate processing apparatus | Kotaru Akutsu | 2007-01-02 |
| 7154588 | Alignment apparatus and exposure apparatus | — | 2006-12-26 |
| 7064804 | Temperature adjustment apparatus, exposure apparatus having the temperature adjustment apparatus, and semiconductor device manufacturing method | — | 2006-06-20 |
| 7057703 | Exposure apparatus | Hirohide Matsuhisa, Kotaro Akutsu | 2006-06-06 |
| 7053982 | Alignment apparatus and exposure apparatus | — | 2006-05-30 |
| 7038759 | Exposure apparatus | Hirohide Matsuhisa, Kotaro Akutsu | 2006-05-02 |
| 7012690 | Substrate processing apparatus | Kotaro Akutsu | 2006-03-14 |
| 6982782 | Processing apparatus for processing object in vessel | — | 2006-01-03 |
| 6972499 | Linear motor, stage apparatus, exposure apparatus, and device manufacturing method | — | 2005-12-06 |
| 6954258 | Positioning apparatus | — | 2005-10-11 |
| 6915179 | PIPE STRUCTURE, ALIGNMENT APPARATUS, ELECTRON BEAM LITHOGRAPHY APPARATUS, EXPOSURE APPARATUS, EXPOSURE APPARATUS MAINTENANCE METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD, AND SEMICONDUCTOR MANUFACTURING FACTORY | — | 2005-07-05 |
| 6879382 | Substrate processing apparatus | Kotaro Akutsu | 2005-04-12 |
| 6836031 | Linear motor and exposure apparatus using the same | Kazuhito Outuka, Yoshikazu Miyajima | 2004-12-28 |
| 6810298 | Temperature adjustment apparatus, exposure apparatus having the temperature adjustment apparatus, and semiconductor device manufacturing method | — | 2004-10-26 |
| 6791670 | Exposure apparatus, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method | Yoshikazu Miyajima, Kazuhito Outuka | 2004-09-14 |