Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6836031 | Linear motor and exposure apparatus using the same | Keiji Emoto, Yoshikazu Miyajima | 2004-12-28 |
| 6791670 | Exposure apparatus, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method | Yoshikazu Miyajima, Keiji Emoto | 2004-09-14 |