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Optical device, projection optical system, exposure apparatus using the same, and method for manufacturing article |
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Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article |
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Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article |
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Reflecting mirror and exposure apparatus using the same |
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Hydrostatic bearing and stage apparatus using same |
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2007-06-19 |
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Static gas bearing system, stage mechanism, exposure apparatus, and device manufacturing method |
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2007-04-24 |
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Weight compensation apparatus, stage apparatus using the same, and exposure apparatus |
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2003-12-02 |
