Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9442052 | Torsion tester | Sigeru Matsumoto, Hiroshi Miyashita, Kazuhiro Murauchi, Tomotaka Sakagami | 2016-09-13 |
| 9410250 | Discharge surface treatment electrode and method of manufacturing the same | Hiroki Yoshizawa, Satoshi Kurita, Mitsutoshi Watanabe, Kyouhei Nomura, Yukihiro Shimoda +1 more | 2016-08-09 |
| 9032813 | Torsion tester | Sigeru Matsumoto, Hiroshi Miyashita, Kazuhiro Murauchi, Tomotaka Sakagami, Yasuyuki Mido +1 more | 2015-05-19 |
| 8984965 | Rotational torsion tester | Sigeru Matsumoto, Hiroshi Miyashita, Kazuhiro Murauchi | 2015-03-24 |
| 8077391 | Wavefront aberration measuring method, mask, wavefront aberration measuring device, exposure apparatus, and device manufacturing method | Chidane Ouchi, Seima Kato | 2011-12-13 |
| 7352475 | Measuring method and apparatus using shearing interferometry, exposure method and apparatus using the same, and device manufacturing method | — | 2008-04-01 |
| 7295326 | Apparatus and method for measuring the optical performance of an optical element | — | 2007-11-13 |
| 7072023 | Position detection apparatus having a plurality of detection sections, and exposure apparatus | Hisaaki Oguri, Toyoshige Sasaki | 2006-07-04 |
| 6972847 | Position detecting system and exposure apparatus using the same | Hideki Ina, Minoru Yoshii, Takashi Satoh | 2005-12-06 |
| 6906805 | Position detecting system and exposure apparatus using the same | Hideki Ina, Minoru Yoshii, Takashi Satoh | 2005-06-14 |
| 6636311 | Alignment method and exposure apparatus using the same | Hideki Ina, Minoru Yoshii, Takashi Satoh | 2003-10-21 |
| 6529263 | Position detection apparatus having a plurality of detection sections, and exposure apparatus | Hisaaki Oguri, Toyoshige Sasaki | 2003-03-04 |
| 6266130 | Position detecting method and position detecting system | Hideki Ina | 2001-07-24 |
| 6157452 | Position detecting apparatus | Kenji Saitoh | 2000-12-05 |
| 6124601 | Position sensor having a reflective projecting system and device fabrication method using the sensor | Minoru Yoshii, Kyoichi Miyazaki | 2000-09-26 |
| 6040909 | Surface position detecting system and device manufacturing method using the same | Minoru Yoshii, Yoshinori Ohsaki | 2000-03-21 |
| 5969820 | Surface position detecting system and exposure apparatus using the same | Minoru Yoshii, Kyoichi Miyazaki | 1999-10-19 |
| 5834767 | Surface position detecting system and projection exposure apparatus using the same | Minoru Yoshii, Kyoichi Miyazaki | 1998-11-10 |
| 5777744 | Exposure state detecting system and exposure apparatus using the same | Minoru Yoshii, Kyoichi Miyazaki, Seiji Takeuchi | 1998-07-07 |
| 5750294 | Best focus determining method | Minoru Yoshii, Seiji Takeuchi | 1998-05-12 |
| 5726758 | Position detecting system | Hiroshi Osawa | 1998-03-10 |
| 5717492 | Position detecting apparatus and a method for manufacturing semiconductor devices using the apparatus | Koichi Sentoku, Kenji Saitoh, Hiroshi Osawa | 1998-02-10 |
| 5523844 | Displacement detection apparatus | Minoru Yoshii, Noriaki Ohguri, Masayoshi Sekine, Seiji Mishima | 1996-06-04 |
| 5495336 | Position detecting method for detecting a positional relationship between a first object and a second object | Noriyuki Nose, Kunitaka Ozawa | 1996-02-27 |
| 5396335 | Position detecting method | Kenji Saitoh, Shigeyuki Suda | 1995-03-07 |