Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7072023 | Position detection apparatus having a plurality of detection sections, and exposure apparatus | Toyoshige Sasaki, Masanobu Hasegawa | 2006-07-04 |
| 6529263 | Position detection apparatus having a plurality of detection sections, and exposure apparatus | Toyoshige Sasaki, Masanobu Hasegawa | 2003-03-04 |