Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5369486 | Position detector for detecting the position of an object using a diffraction grating positioned at an angle | Takahiro Matsumoto, Noriyuki Nose, Minoru Yoshii, Kenji Saitoh, Koichi Sentoku | 1994-11-29 |
| 5343291 | Method and apparatus for measuring an interval between two objects | Mitsutoshi Ohwada, Masakazu Matsugu, Shigeyuki Suda, Minoru Yoshii, Yukichi Niwa +2 more | 1994-08-30 |
| 5313272 | Method and apparatus for measuring deviation between patterns on a semiconductor wafer | Noriyuki Nose, Kenji Saitoh, Hiroshi Osawa | 1994-05-17 |
| 5291023 | Position detecting system utilizing a weight coefficient to determine a gravity center of light | Minoru Yoshii, Naoto Abe | 1994-03-01 |