Issued Patents All Time
Showing 1–25 of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10401744 | Calibration method, measurement apparatus, exposure apparatus, and method of manufacturing article | Koichi Sentoku, Osamu Morimoto, Takahiro Matsumoto | 2019-09-03 |
| 9639008 | Lithography apparatus, and article manufacturing method | Yuichiro Morikuni, Osamu Morimoto | 2017-05-02 |
| 8400612 | Wavefront aberration measurement apparatus, exposure apparatus, and method of manufacturing device | Kazuki Yamamoto | 2013-03-19 |
| 8294875 | Exposure apparatus and device fabrication method | — | 2012-10-23 |
| 8130360 | Exposure apparatus and device manufacturing method | Shinichiro Hirai, Tetsuya Mori, Seiya Miura | 2012-03-06 |
| 8013980 | Exposure apparatus equipped with interferometer and exposure apparatus using the same | — | 2011-09-06 |
| 7787103 | Projection exposure apparatus, optical member, and device manufacturing method | Shinichiro Hirai, Yoshiyuki Kuramoto | 2010-08-31 |
| 7602504 | Exposure apparatus and device manufacturing method | Miwako Ando | 2009-10-13 |
| 7417712 | Exposure apparatus having interferometer and device manufacturing method | Miwaki Ando | 2008-08-26 |
| 7403263 | Exposure apparatus | — | 2008-07-22 |
| 7330237 | Exposure apparatus equipped with interferometer and method of using same | — | 2008-02-12 |
| 7221431 | Exposure apparatus | — | 2007-05-22 |
| 7218379 | Scanning exposure apparatus and method | Yuichi Osakabe | 2007-05-15 |
| 7154582 | Exposure apparatus and method | — | 2006-12-26 |
| 7148956 | Exposure method | — | 2006-12-12 |
| 7050150 | Exposure apparatus | Yuichi Osakabe | 2006-05-23 |
| 7046333 | Exposure method | — | 2006-05-16 |
| 6989885 | Scanning exposure apparatus and method | Yuichi Osakabe | 2006-01-24 |
| 6833906 | Projection exposure apparatus, and device manufacturing method using the same | — | 2004-12-21 |
| 6649484 | Aligning method, exposure apparatus using this aligning method, and semiconductor device manufacturing method utilizing this exposure apparatus | — | 2003-11-18 |
| 6646714 | Exposure apparatus, imaging performance measurement method, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance method | — | 2003-11-11 |
| 6278514 | Exposure apparatus | — | 2001-08-21 |
| 6215549 | Apparatus for measuring optical characteristics | Takashi Suzuki | 2001-04-10 |
| 6088115 | Apparatus and method for measuring optical anisotropy | Takashi Suzuki | 2000-07-11 |
| 6040909 | Surface position detecting system and device manufacturing method using the same | Masanobu Hasegawa, Minoru Yoshii | 2000-03-21 |