Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10018722 | Measurement apparatus | Yuya Nishikawa | 2018-07-10 |
| 9372068 | Measuring apparatus including multi-wavelength interferometer | Akihiro Hatada | 2016-06-21 |
| 9297745 | Shape measuring apparatus, and method of manufacturing article | Akihiro Hatada | 2016-03-29 |
| 9175953 | Measurement apparatus to calculate wavefront aberration of optical system using shearing interference fringes, exposure apparatus, and method of manufacturing device | — | 2015-11-03 |
| 9115971 | Measuring apparatus | — | 2015-08-25 |
| 8830480 | Measurement apparatus | Taro Tezuka, Yusuke Koda | 2014-09-09 |
| 8797542 | Measurement apparatus | Takumi Tokimitsu | 2014-08-05 |
| 8724114 | Interferometer and distance calculation method therefor | — | 2014-05-13 |
| 8692975 | Measurement apparatus, exposure apparatus, and device fabrication method | — | 2014-04-08 |
| 8576404 | Optical interferometer | Takamasa Sasaki | 2013-11-05 |
| 8559015 | Measuring apparatus | — | 2013-10-15 |
| 8542345 | Measurement apparatus, exposure apparatus, and device manufacturing method to measure numerical aperture of the optical system using interference fringe | Takeshi Suzuki | 2013-09-24 |
| 8502986 | Lightwave interference measurement apparatus that calculates absolute distance using lightwave interference | Yusuke Koda | 2013-08-06 |
| 8416422 | Lightwave interference measurement apparatus used to measure optical path length or distance | Takamasa Sasaki | 2013-04-09 |
| 8363226 | Optical interference measuring apparatus | — | 2013-01-29 |
| 8339611 | Interferometric distance measurement with harmonic frequency comb generated beams | — | 2012-12-25 |
| 8243256 | Measurement apparatus for measuring an aberration of an optical system, measurement method, exposure apparatus, and device fabrication method | Takeshi Suzuki | 2012-08-14 |
| 8174670 | Measurement method and exposure apparatus | Taro Tezuka | 2012-05-08 |
| 8174675 | Measuring apparatus, optical system manufacturing method, exposure apparatus, device manufacturing method, and processing apparatus | Takeshi Suzuki | 2012-05-08 |
| 7995213 | Measurement method, measurement apparatus, exposure apparatus, and device fabrication method | Osamu Kakuchi | 2011-08-09 |
| 7910871 | Injection-locked laser, interferometer, exposure apparatus, and device manufacturing method | — | 2011-03-22 |
| 7907263 | Apparatuses and methods using measurement of a flare generated in an optical system | Michiko Aizawa, Eiji Aoki, Osamu Kakuchi | 2011-03-15 |
| 7787103 | Projection exposure apparatus, optical member, and device manufacturing method | Shinichiro Hirai, Yoshinori Ohsaki | 2010-08-31 |
| 7773233 | Method of measuring wavefront retardance aberration based on wavefront and birefringent characteristics | Osamu Kakuchi | 2010-08-10 |
| 7608808 | Injection-locked pulsed laser with high wavelength stability | — | 2009-10-27 |