Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9113507 | Light source apparatus and method of controlling the same | — | 2015-08-18 |
| 8830480 | Measurement apparatus | Yoshiyuki Kuramoto, Yusuke Koda | 2014-09-09 |
| 8174670 | Measurement method and exposure apparatus | Yoshiyuki Kuramoto | 2012-05-08 |
| 7724376 | Wavefront-aberration measuring method and device, and exposure apparatus including the device | — | 2010-05-25 |
| 7518735 | Measurement method and apparatus, exposure apparatus, and device manufacturing method | — | 2009-04-14 |
| 7463365 | Measurement method and apparatus, exposure apparatus, and device manufacturing method | — | 2008-12-09 |
| 7428059 | Measurement method and apparatus, exposure apparatus, and device manufacturing method | — | 2008-09-23 |