Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7995213 | Measurement method, measurement apparatus, exposure apparatus, and device fabrication method | Yoshiyuki Kuramoto | 2011-08-09 |
| 7907263 | Apparatuses and methods using measurement of a flare generated in an optical system | Michiko Aizawa, Eiji Aoki, Yoshiyuki Kuramoto | 2011-03-15 |
| 7773233 | Method of measuring wavefront retardance aberration based on wavefront and birefringent characteristics | Yoshiyuki Kuramoto | 2010-08-10 |
| 7276717 | Measuring apparatus, exposure apparatus and device manufacturing method | Yoshiyuki Kuramoto | 2007-10-02 |
| 7236254 | Exposure apparatus with interferometer | Eiichi Murakami | 2007-06-26 |
| 7095509 | Aberration measuring method for projection optical system with a variable numerical aperture in an exposure apparatus | — | 2006-08-22 |
| 7023561 | Exposure apparatus with interferometer | Eiichi Murakami | 2006-04-04 |
| 6924881 | Projection exposure apparatus | Eiichi Murakami | 2005-08-02 |
| 6633362 | Projection exposure apparatus | Eiichi Murakami | 2003-10-14 |
| 6614535 | Exposure apparatus with interferometer | Eiichi Murakami | 2003-09-02 |
| 5087121 | Depth/height measuring device | Mikichi Ban | 1992-02-11 |
| 4850709 | Fabri-perot spectroscopy method and apparatus utilizing the same | Mikichi Ban, Hironori Yamamoto, Masaru Ohtsuka, Osamu SHIBA, Kazuhiko Hara | 1989-07-25 |