Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8797542 | Measurement apparatus | Yoshiyuki Kuramoto | 2014-08-05 |
| 8437004 | Detection apparatus | Yuhei Sumiyoshi, Hiroyuki Yuuki | 2013-05-07 |
| 8179520 | Optical element, projection optical system, exposure apparatus, and device fabrication method | — | 2012-05-15 |