Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12105430 | Exposure apparatus, exposure method, and manufacturing method for product | — | 2024-10-01 |
| 11835863 | Exposure apparatus, exposure method, and manufacturing method for product | — | 2023-12-05 |
| 11656554 | Exposure apparatus, exposure method, and method of manufacturing article | Daisuke Kobayashi | 2023-05-23 |
| 10545413 | Evaluation method, exposure method, and method for manufacturing an article | Bunsuke Takeshita, Noritoshi Sakamoto | 2020-01-28 |
| 10191394 | Distortion detection method, exposure apparatus, exposure method, and device manufacturing method | — | 2019-01-29 |
| 8760618 | Projection optical system, exposure apparatus and device manufacturing method | — | 2014-06-24 |
| 8477286 | Projection optical system, exposure apparatus, and device manufacturing method | — | 2013-07-02 |
| 8437004 | Detection apparatus | Takumi Tokimitsu, Hiroyuki Yuuki | 2013-05-07 |
| 7408620 | Exposure apparatus | — | 2008-08-05 |
| 7403262 | Projection optical system and exposure apparatus having the same | — | 2008-07-22 |
| 7365826 | Projection optical system, exposure apparatus and method using the same | Masayuki Suzuki | 2008-04-29 |
| 7215410 | Exposure apparatus | — | 2007-05-08 |
| 7006194 | Projection optical system, exposure apparatus and method using the same | Masayuki Suzuki | 2006-02-28 |
| 6256086 | Projection exposure apparatus, and device manufacturing method | — | 2001-07-03 |
| 6014455 | Projection exposure apparatus and device manufacturing method | Koji Mikami | 2000-01-11 |