Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10545413 | Evaluation method, exposure method, and method for manufacturing an article | Bunsuke Takeshita, Yuhei Sumiyoshi | 2020-01-28 |
| 10455160 | Detecting apparatus, detecting method, computer-readable medium storing a program, lithography apparatus, and article manufacturing method that control imaging device to perform imaging at particular time period | — | 2019-10-22 |
| 9400437 | Position measurement apparatus and exposure apparatus which measure position of object using reference mark, and method of manufacturing device | — | 2016-07-26 |
| 9097991 | Exposure apparatus, method of controlling the same and method of manufacturing device | — | 2015-08-04 |
| 9036131 | Exposure apparatus and device fabrication method | — | 2015-05-19 |
| 8259310 | Position detection apparatus, exposure apparatus, and method of manufacturing device | — | 2012-09-04 |
| 8149423 | Position detection apparatus, exposure apparatus, and method of manufacturing device | — | 2012-04-03 |