Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10545413 | Evaluation method, exposure method, and method for manufacturing an article | Yuhei Sumiyoshi, Noritoshi Sakamoto | 2020-01-28 |
| 9766548 | Exposure apparatus, exposure method, and method of manufacturing article | — | 2017-09-19 |
| 9104119 | Exposure apparatus and device fabrication method for reducing a change in aberration due to driving error | — | 2015-08-11 |
| 8659740 | Drive error compensation for projection optics | — | 2014-02-25 |