Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8437004 | Detection apparatus | Yuhei Sumiyoshi, Takumi Tokimitsu | 2013-05-07 |
| 8432532 | Projection optical system with rarefaction compensation | — | 2013-04-30 |
| 7714985 | Projection optical system | Takashi Kato | 2010-05-11 |
| 7706075 | Projection optical system, exposure apparatus, and device fabrication method | — | 2010-04-27 |