Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7626680 | Exposure apparatus and device fabrication method using the same | Tetsuya Mori, Tadayasu Nishikawa | 2009-12-01 |
| 7218379 | Scanning exposure apparatus and method | Yoshinori Ohsaki | 2007-05-15 |
| 7050150 | Exposure apparatus | Yoshinori Ohsaki | 2006-05-23 |
| 6989885 | Scanning exposure apparatus and method | Yoshinori Ohsaki | 2006-01-24 |
| 6847432 | Alignment system and projection exposure apparatus | Nobuhiro Kodachi | 2005-01-25 |
| 6683673 | Alignment system and projection exposure apparatus | Nobuhiro Kodachi | 2004-01-27 |
| 6532056 | Alignment system and projection exposure apparatus | Nobuhiro Kodachi | 2003-03-11 |
| 6226133 | Optical apparatus and a method of transporting the same | — | 2001-05-01 |