Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6847432 | Alignment system and projection exposure apparatus | Yuichi Osakabe | 2005-01-25 |
| 6683673 | Alignment system and projection exposure apparatus | Yuichi Osakabe | 2004-01-27 |
| 6532056 | Alignment system and projection exposure apparatus | Yuichi Osakabe | 2003-03-11 |
| 5963316 | Method and apparatus for inspecting a surface state | Seiya Miura, Michio Kohno | 1999-10-05 |
| 5105092 | Inspecting apparatus having a detection sensitivity controller means | Katsutoshi Natsubori, Michio Kohno | 1992-04-14 |