Issued Patents All Time
Showing 1–25 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7292316 | Illumination optical system and exposure apparatus having the same | — | 2007-11-06 |
| 7079220 | Illumination optical system and method, and exposure apparatus | — | 2006-07-18 |
| 6999157 | Illumination optical system and method, and exposure apparatus | — | 2006-02-14 |
| 6857764 | Illumination optical system and exposure apparatus having the same | — | 2005-02-22 |
| 6833905 | Illumination apparatus, projection exposure apparatus, and device fabricating method | — | 2004-12-21 |
| 6621061 | Exposure method and device manufacturing method using the same | — | 2003-09-16 |
| 6603530 | Exposure apparatus that illuminates a mark and causes light from the mark to be incident on a projection optical system | — | 2003-08-05 |
| 5963316 | Method and apparatus for inspecting a surface state | Seiya Miura, Nobuhiro Kodachi | 1999-10-05 |
| 5774575 | Inspection apparatus, and exposure apparatus and device manufacturing method using the inspection apparatus | Hiroshi Tanaka | 1998-06-30 |
| 5652657 | Inspection system for original with pellicle | Minoru Yoshii, Seiya Miura, Kyoichi Miyazaki, Toshihiko Tsuji, Seiji Takeuchi | 1997-07-29 |
| 5602639 | Surface-condition inspection method and apparatus including a plurality of detecting elements located substantially at a pupil plane of a detection optical system | — | 1997-02-11 |
| 5591985 | Surface state inspecting system including a scanning optical system for scanning a surface to be inspected with a first light and for simultaneously scanning a diffraction grating with a second light | Toshihiko Tsuji | 1997-01-07 |
| 5585916 | Surface inspecting device | Seiya Miura | 1996-12-17 |
| 5581089 | Apparatus and method for inspecting a reticle for color centers | — | 1996-12-03 |
| 5581348 | Surface inspecting device using bisected multi-mode laser beam and system having the same | Seiya Miura, Takehiko Iwanaga | 1996-12-03 |
| 5528360 | Surface-condition inspection apparatus | — | 1996-06-18 |
| 5448350 | Surface state inspection apparatus and exposure apparatus including the same | — | 1995-09-05 |
| 5399867 | Foreign particle inspection apparatus | — | 1995-03-21 |
| 5381225 | Surface-condition inspection apparatus | — | 1995-01-10 |
| 5359407 | Optical scanning apparatus, surface-state inspection apparatus and exposure apparatus | Akiyoshi Suzuki | 1994-10-25 |
| 5162867 | Surface condition inspection method and apparatus using image transfer | — | 1992-11-10 |
| 5105092 | Inspecting apparatus having a detection sensitivity controller means | Katsutoshi Natsubori, Nobuhiro Kodachi | 1992-04-14 |
| 5017798 | Surface examining apparatus for detecting the presence of foreign particles on two or more surfaces | Eiichi Murakami, Akiyoshi Suzuki | 1991-05-21 |
| 4999511 | Surface state inspecting device for inspecting the state of parallel first and second surfaces | — | 1991-03-12 |
| 4886975 | Surface examining apparatus for detecting the presence of foreign particles on two or more surfaces | Eiichi Murakami, Akiyoshi Suzuki | 1989-12-12 |