Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4871257 | Optical apparatus for observing patterned article | Akiyoshi Suzuki | 1989-10-03 |
| 4865455 | Optical device having a variable geometry filter usable for aligning a mask or reticle with a wafer | Akiyoshi Suzuki | 1989-09-12 |
| 4830499 | Optical device capable of maintaining pupil imaging | Hideki Ina, Akiyoshi Suzuki | 1989-05-16 |
| 4831274 | Surface inspecting device for detecting the position of foreign matter on a substrate | Akiyoshi Suzuki | 1989-05-16 |
| 4795911 | Surface examining apparatus for detecting the presence of foreign particles on the surface | Eiichi Murakami, Akiyoshi Suzuki | 1989-01-03 |
| 4705940 | Focus detection in a projection optical system | — | 1987-11-10 |
| 4653903 | Exposure apparatus | Makoto Torigoe, Akiyoshi Suzuki | 1987-03-31 |