Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12379673 | Control apparatus, lithography apparatus, and article manufacturing method | — | 2025-08-05 |
| 11302551 | Conveyance apparatus, substrate processing apparatus, and method of manufacturing article | — | 2022-04-12 |
| 9639008 | Lithography apparatus, and article manufacturing method | Yoshinori Ohsaki, Osamu Morimoto | 2017-05-02 |