| 9057966 |
Information processing apparatus, information processing method, and memory medium |
Yoshihiro Kawauchi, Kunitaka Ozawa |
2015-06-16 |
| 8516145 |
Information processing method and information processing apparatus for transmitting data generated by device manufacturing apparatus |
Hiroaki Fujiwara, Mitsuhiro Masuda, Kunitaka Ozawa |
2013-08-20 |
| 8373147 |
Exposure apparatus and device manufacturing method |
Kunitaka Ozawa |
2013-02-12 |
| 8239152 |
Information processing apparatus, information processing method, and computer program product |
— |
2012-08-07 |
| 8065270 |
Information processing system, information processing method, and memory medium |
Kunitaka Ozawa, Hiroaki Fujiwara, Yoshihiro Kawauchi, Hisao Nakagawa, Hajime Nakamura +1 more |
2011-11-22 |
| 8060472 |
Information processing system, information processing method, and computer-readable storage medium |
Kunitaka Ozawa, Hiroaki Fujiwara, Yoshihiro Kawauchi, Hisao Nakagawa, Hajime Nakamura +1 more |
2011-11-15 |
