Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6466968 | Information processing system capable of file transmission and information processing apparatus in the system | Masahiko Shirai, Takeshi Baba, Shuji Yamoto, Tokuko Kanda | 2002-10-15 |
| 6333786 | Aligning method | Shigeyuki Uzawa, Masaaki Imaizumi, Hiroshi Tanaka, Noburu Takakura, Yoshio Kaneko | 2001-12-25 |
| 6253248 | Information processing apparatus and method | Takeshi Baba, Masahiko Shirai, Shuji Yamoto, Tokuko Kanda | 2001-06-26 |
| 6097495 | Aligning method | Shigeyuki Uzawa, Masaaki Imaizumi, Hiroshi Tanaka, Noburu Takakura, Yoshio Kaneko | 2000-08-01 |
| 5563708 | Semiconductor device manufacturing method wherein the substrate is interferically aligned by measuring the rotation of the original | — | 1996-10-08 |
| 5543921 | Aligning method utilizing reliability weighting coefficients | Shigeyuki Uzawa, Masaaki Imaizumi, Hiroshi Tanaka, Noburu Takakura, Yoshio Kaneko | 1996-08-06 |
| 4918320 | Alignment method usable in a step-and-repeat type exposure apparatus for either global or dye-by-dye alignment | Bunei Hamasaki, Hajime Igarashi, Naoki Ayata | 1990-04-17 |
| 4881100 | Alignment method | Bunei Hamasaki, Shinji Utamura | 1989-11-14 |
| 4811059 | Alignment method | Bunei Hamasaki, Shinji Utamura | 1989-03-07 |