Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7948695 | Optical element positioning apparatus, projection optical system and exposure apparatus | Ryo Nawata, Makoto Mizuno | 2011-05-24 |
| 7821726 | Optical element positioning apparatus, projection optical system and exposure apparatus | Ryo Nawata, Makoto Mizuno | 2010-10-26 |
| 7525106 | Exposure apparatus, pressure control method for the same, and device manufacturing method | Kouhei Imoto | 2009-04-28 |
| 7166855 | Surface position detecting system and method | Yuichi Yamada | 2007-01-23 |
| 6963075 | Scanning exposure apparatus and device manufacturing method | Yuichi Yamada | 2005-11-08 |
| 6864953 | Exposure apparatus, device manufacturing method, semiconductor manufacturing plant and method of maintaining exposure apparatus | — | 2005-03-08 |
| 6614503 | Projection exposure apparatus, and device manufacturing method which compensate for a change in optical performance of a projection optical system | — | 2003-09-02 |
| 6559465 | Surface position detecting method having a detection timing determination | Yuichi Yamada | 2003-05-06 |
| 6534777 | Surface position detecting system and method having a sensor selection | Yuichi Yamada | 2003-03-18 |
| 6531706 | Surface position detecting system and method having an optimum value | Yuichi Yamada | 2003-03-11 |
| 6493062 | Driving apparatus and exposure apparatus | Yukio Tokuda, Nobuyoshi Deguchi, Yukio Takabayashi, Hiromichi Hara | 2002-12-10 |
| 6473158 | Exposure method and exposure apparatus | — | 2002-10-29 |
| 6359688 | Projection exposure apparatus and method of controlling same | Satoshi Akimoto, Shinji Wakui | 2002-03-19 |
| 6342703 | Exposure apparatus, exposure method, and device manufacturing method employing the exposure method | Shinichiro Koga | 2002-01-29 |
| 6342942 | Exposure apparatus, exposure control method, and device fabrication method using the exposure apparatus | — | 2002-01-29 |
| 6333786 | Aligning method | Akiya Nakai, Masaaki Imaizumi, Hiroshi Tanaka, Noburu Takakura, Yoshio Kaneko | 2001-12-25 |
| 6307620 | Substrate holding apparatus, substrate transfer system, exposure apparatus, coating apparatus, method for making a device, and method for cleaning a substrate holding section | Yukio Takabayashi | 2001-10-23 |
| 6271910 | Projection exposure apparatus and method | — | 2001-08-07 |
| 6142660 | Semiconductor manufacturing apparatus and command setting method | Norihiko Utsunomiya | 2000-11-07 |
| 6097495 | Aligning method | Akiya Nakai, Masaaki Imaizumi, Hiroshi Tanaka, Noburu Takakura, Yoshio Kaneko | 2000-08-01 |
| 6081614 | Surface position detecting method and scanning exposure method using the same | Yuichi Yamada | 2000-06-27 |
| 5986766 | Alignment method and alignment system | Shinichiro Koga | 1999-11-16 |
| 5920398 | Surface position detecting method and scanning exposure method using the same | Takehiko Iwanaga, Yuichi Yamada | 1999-07-06 |
| 5793471 | Projection exposure method and apparatus in which scanning exposure is performed in accordance with a shot layout of mask patterns | Tsuneo Kanda, Yuichi Yamada | 1998-08-11 |
| 5783341 | Alignment for layer formation through determination of target values for translation, rotation and magnification | — | 1998-07-21 |