Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10481509 | Vibration damping apparatus, lithography apparatus, and method of manufacturing article | Yoshihiro Morimoto, Masahiko Ogawa, Ryo Takai | 2019-11-19 |
| 8780329 | Exposure apparatus, structure, method for setting up apparatus, and device manufacturing method having filling member formed by hardening liquid to support setting leg | Yasuyo Kawabata | 2014-07-15 |
| 7944546 | Exposure apparatus and device manufacturing method | Masatomi Yoshida | 2011-05-17 |
| 7821617 | Exposure apparatus and device manufacturing method | — | 2010-10-26 |
| 7227617 | Exposure apparatus and device manufacturing method | — | 2007-06-05 |
| 7060414 | Radiation-sensitive resin composition | Aki Suzuki, Makoto Murata, Eiichi Kobayashi | 2006-06-13 |
| 6914663 | Exposure apparatus | — | 2005-07-05 |
| 6899989 | Radiation-sensitive resin composition | Aki Suzuki, Makoto Murata, Eiichi Kobayashi | 2005-05-31 |
| 6897939 | Exposure apparatus | — | 2005-05-24 |
| 6885431 | Exposure apparatus and method of manufacturing a semiconductor device using the same | — | 2005-04-26 |
| 6862077 | Anti-vibration system for exposure apparatus | — | 2005-03-01 |
| 6623907 | Radiation-sensitive resin composition | Jun Numata, Aki Suzuki, Norihiro Natsume, Kiyoshi Murata, Masafumi Yamamoto +3 more | 2003-09-23 |
| 6512571 | Anti-vibration system for exposure apparatus | — | 2003-01-28 |
| 6493062 | Driving apparatus and exposure apparatus | Yukio Tokuda, Nobuyoshi Deguchi, Shigeyuki Uzawa, Yukio Takabayashi | 2002-12-10 |
| 6048659 | Radiation-sensitive resin composition | Masaaki Inoue, Katsumi Inomata, Yoshiji Yumoto | 2000-04-11 |
| 5881987 | Vibration damping apparatus | — | 1999-03-16 |