| 7202016 |
Radiation-sensitive resin composition |
Masaaki Miyaji, Tomoki Nagai, Yuji Yada, Yukio Nishimura, Masafumi Yamamoto +3 more |
2007-04-10 |
| 6933094 |
Radiation-sensitive resin composition |
Masaaki Miyaji, Tomoki Nagai, Yuji Yada, Yukio Nishimura, Masafumi Yamamoto +3 more |
2005-08-23 |
| 6846607 |
Carbazole derivative and chemically amplified radiation-sensitive resin composition |
Tomoki Nagai, Shirou Kusumoto, Eiichi Kobayashi |
2005-01-25 |
| 6821705 |
Radiation-sensitive resin composition |
Tomoki Nagai, Eiichi Kobayashi, Tsutomu Shimokawa |
2004-11-23 |
| 6623907 |
Radiation-sensitive resin composition |
Aki Suzuki, Hiromichi Hara, Norihiro Natsume, Kiyoshi Murata, Masafumi Yamamoto +3 more |
2003-09-23 |
| 6517992 |
N-sulfonyloxyimide compound and radiation-sensitive resin composition using the same |
Yong Wang, Eiichi Kobayashi, Masaaki Miyaji, Tsutomu Shimokawa |
2003-02-11 |
| 6506537 |
Radiation-sensitive resin composition |
Eiichi Kobayashi, Mikio Yamachika, Masafumi Yamamoto |
2003-01-14 |
| 6465150 |
Radiation-sensitive resin composition |
Shirou Kusumoto, Eiichi Kobayashi |
2002-10-15 |
| 6280900 |
Radiation-sensitive resin composition |
Takashi Chiba |
2001-08-28 |