Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7463334 | Exposure apparatus and device manufacturing method | — | 2008-12-09 |
| 6493062 | Driving apparatus and exposure apparatus | Nobuyoshi Deguchi, Shigeyuki Uzawa, Yukio Takabayashi, Hiromichi Hara | 2002-12-10 |
| 6320645 | Stage system and exposure apparatus, and device manufacturing method using the same | Mitsuru Inoue, Nobushige Korenaga | 2001-11-20 |
| 6320649 | Stage system for exposure apparatus | Yoshikazu Miyajima | 2001-11-20 |
| 6103433 | Exposure method using reticle remount for temperature influence correction | — | 2000-08-15 |
| 5691806 | Projection exposure apparatus containing an enclosed hollow structure | Yukio Takabayashi | 1997-11-25 |
| 5187519 | Exposure apparatus having mount means to suppress vibrations | Yukio Takabayashi | 1993-02-16 |
| 4775877 | Method and apparatus for processing a plate-like workpiece | Masao Kosugi | 1988-10-04 |
| 4757355 | Mask storing mechanism | Kazuo Iizuka, Masao Kosugi | 1988-07-12 |