Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148181 | Measurement apparatus that measures position information of measurement target in predetermined direction | Satoru Jimbo, Noburu Takakura, Yusuke Miura | 2024-11-19 |
| 11721013 | Information processing apparatus, determination method, imprint apparatus, lithography system, article manufacturing method, and non-transitory computer-readable storage medium | Mitsuhiro Masuda | 2023-08-08 |
| 11061335 | Information processing apparatus, storage medium, lithography apparatus, lithography system, and article manufacturing method | Noburu Takakura, Takahiro Takiguchi | 2021-07-13 |
| 10996574 | Substrate processing apparatus, article manufacturing method, substrate processing method, substrate processing system, management apparatus, and storage medium | Takahiro Takiguchi | 2021-05-04 |
| 9880475 | Lithography apparatus, lithography method, lithography system, storage medium, and article manufacturing method | Noburu Takakura, Akihiko Kawamura | 2018-01-30 |
| 9423700 | Lithography apparatus, lithography method, lithography system, storage medium, and article manufacturing method | Noburu Takakura, Akihiko Kawamura | 2016-08-23 |
| 9261802 | Lithography apparatus, alignment method, and method of manufacturing article | Kazuhiko Mishima | 2016-02-16 |
| 8384900 | Exposure apparatus | — | 2013-02-26 |
| 8305555 | Exposure apparatus, exposure method, and device manufacturing method | Noburu Takakura | 2012-11-06 |
| 7990519 | Exposure apparatus and device manufacturing method | — | 2011-08-02 |
| 7477390 | Exposure method and apparatus, and device manufacturing method | — | 2009-01-13 |
| 7315348 | Exposure apparatus, focal point detecting method, exposure method and device manufacturing method | — | 2008-01-01 |
| 6661838 | Image processing apparatus for detecting changes of an image signal and image processing method therefor | Yoshihiro Ishida | 2003-12-09 |
| 6556711 | Image processing apparatus and method | Yoshihiro Ishida, Osamu Yoshizaki | 2003-04-29 |
| 6538260 | Position measuring method, and semiconductor device manufacturing method and apparatus using the same | — | 2003-03-25 |
| 6342703 | Exposure apparatus, exposure method, and device manufacturing method employing the exposure method | Shigeyuki Uzawa | 2002-01-29 |
| 6298156 | Image processing apparatus and method | Yoshihiro Ishida, Nobuyuki Shigeeda | 2001-10-02 |
| 6289136 | Image processing method and apparatus | Takahiro Oshino, Yoshihiro Ishida, Osamu Morimoto | 2001-09-11 |
| 6232978 | Image processing apparatus, and method of controlling same, using a combination of enlargement and fixed ratio reduction processing | Yoshihiro Ishida, Nobuyuki Shigeeda, Takeshi Kawazome | 2001-05-15 |
| 5986766 | Alignment method and alignment system | Shigeyuki Uzawa | 1999-11-16 |
| 5974195 | Image processing apparatus and method | Takeshi Kawazome, Yoshihiro Ishida, Nobuyuki Shigeeda | 1999-10-26 |
| 5848185 | Image processing apparatus and method | Yoshihiro Ishida, Osamu Yoshizaki | 1998-12-08 |
| 5832141 | Image processing method and apparatus using separate processing for pseudohalf tone area | Yoshihiro Ishida, Nobuyuki Shigeeda | 1998-11-03 |
| 4937289 | Process for producing polyamide | Masaaki Miyamoto, Hidemi Nakanishi | 1990-06-26 |
| 4839458 | Preparation with controlled amounts of polycarbonate carbon tetrachloride | Akira Matsuno, Katsuyuki Sakata, Yoshiaki Ohtani, Isao Akihara | 1989-06-13 |