Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12307643 | Processing apparatus, measurement apparatus, lithography apparatus, method of manufacturing article, model, processing method, measurement method, generation method, and generation apparatus | Satoru Jimbo, Yoshio Suzaki, Kazuhiko Mishima | 2025-05-20 |
| 12148181 | Measurement apparatus that measures position information of measurement target in predetermined direction | Satoru Jimbo, Shinichiro Koga, Yusuke Miura | 2024-11-19 |
| 11061335 | Information processing apparatus, storage medium, lithography apparatus, lithography system, and article manufacturing method | Shinichiro Koga, Takahiro Takiguchi | 2021-07-13 |
| 10754257 | Method of manufacturing pattern and article manufacturing method | — | 2020-08-25 |
| 10372033 | Imprint apparatus, and method of manufacturing article | Kenji Yamamoto | 2019-08-06 |
| 10359711 | Lithography apparatus, lithography method, lithography system, storage medium, and article manufacturing method | Yoshihito Tada | 2019-07-23 |
| 9880475 | Lithography apparatus, lithography method, lithography system, storage medium, and article manufacturing method | Shinichiro Koga, Akihiko Kawamura | 2018-01-30 |
| 9423700 | Lithography apparatus, lithography method, lithography system, storage medium, and article manufacturing method | Shinichiro Koga, Akihiko Kawamura | 2016-08-23 |
| 8305555 | Exposure apparatus, exposure method, and device manufacturing method | Shinichiro Koga | 2012-11-06 |
| 6333786 | Aligning method | Shigeyuki Uzawa, Akiya Nakai, Masaaki Imaizumi, Hiroshi Tanaka, Yoshio Kaneko | 2001-12-25 |
| 6097495 | Aligning method | Shigeyuki Uzawa, Akiya Nakai, Masaaki Imaizumi, Hiroshi Tanaka, Yoshio Kaneko | 2000-08-01 |
| 5543921 | Aligning method utilizing reliability weighting coefficients | Shigeyuki Uzawa, Akiya Nakai, Masaaki Imaizumi, Hiroshi Tanaka, Yoshio Kaneko | 1996-08-06 |