Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10359711 | Lithography apparatus, lithography method, lithography system, storage medium, and article manufacturing method | Noburu Takakura | 2019-07-23 |
YT
Yoshihito Tada
Overall (All Time): #4,127,238 of 4,157,543Top 100%
1
Patents All Time