Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12339595 | Measurement apparatus, lithography apparatus, and article manufacturing method | Kazuhiko Mishima | 2025-06-24 |
| 12307643 | Processing apparatus, measurement apparatus, lithography apparatus, method of manufacturing article, model, processing method, measurement method, generation method, and generation apparatus | Yoshio Suzaki, Kazuhiko Mishima, Noburu Takakura | 2025-05-20 |
| 12148181 | Measurement apparatus that measures position information of measurement target in predetermined direction | Noburu Takakura, Shinichiro Koga, Yusuke Miura | 2024-11-19 |