Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12307643 | Processing apparatus, measurement apparatus, lithography apparatus, method of manufacturing article, model, processing method, measurement method, generation method, and generation apparatus | Satoru Jimbo, Kazuhiko Mishima, Noburu Takakura | 2025-05-20 |
| 11415882 | Template for imprint and imprint method using template | Tomomi Funayoshi, Toshihiko Nishida | 2022-08-16 |
| 8624205 | Charged particle beam writing apparatus and device production method | Isamu Seto, Masamichi Kuwabara | 2014-01-07 |
| 6087048 | Method of producing block mask for electron-beam lithography apparatuses | Takayuki Sakakibara, Kiichi Sakamoto | 2000-07-11 |