Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12390978 | Imprint method and method for manufacturing article | Ryosuke Hamamoto | 2025-08-19 |
| 12099295 | Imprint apparatuses and article manufacturing methods applying viscosity increases without curing of imprint material | Hiroyuki Koide, Kenichi Kobayashi, Tatsuya Hayashi | 2024-09-24 |
| 11904522 | Imprint apparatus and method for manufacturing article | Tatsuya Hayashi, Kenichi Kobayashi | 2024-02-20 |
| 11822236 | Mold, imprint apparatus, and method of manufacturing article | Atsushi Kimura, Hiroshi Sato | 2023-11-21 |
| 11415882 | Template for imprint and imprint method using template | Yoshio Suzaki, Toshihiko Nishida | 2022-08-16 |
| 10661486 | Imprint system and method of manufacturing article | Takuro Yamazaki, Hiromitsu Yamaguchi, Masayoshi Fujimoto | 2020-05-26 |
| 10481492 | Imprint apparatus and method of manufacturing article | Takuro Yamazaki, Masayoshi Fujimoto | 2019-11-19 |
| 10451965 | Imprint system and method of manufacturing article | Takuro Yamazaki, Masayoshi Fujimoto, Hiromitsu Yamaguchi | 2019-10-22 |
| 10315344 | Imprint apparatus, imprint method, and method of manufacturing article | Masayoshi Fujimoto, Takuro Yamazaki, Hiromitsu Yamaguchi | 2019-06-11 |
| 9946173 | Imprinting apparatus, imprinting method, and article manufacturing method | Takuro Yamazaki, Masayoshi Fujimoto, Hiromitsu Yamaguchi | 2018-04-17 |
| 9465303 | Exposure apparatus and device manufacturing method | Atsushi Takagi, Yoya Muraguchi | 2016-10-11 |
| 9229313 | Exposure apparatus and device manufacturing method | Atsushi Takagi, Yoya Muraguchi | 2016-01-05 |