Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9465303 | Exposure apparatus and device manufacturing method | Atsushi Takagi, Tomomi Funayoshi | 2016-10-11 |
| 9229313 | Exposure apparatus and device manufacturing method | Atsushi Takagi, Tomomi Funayoshi | 2016-01-05 |