Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8428763 | Management apparatus, exposure method, and method of manufacturing device | — | 2013-04-23 |
| 6867845 | Mask and projection exposure apparatus | — | 2005-03-15 |
| 6233042 | Projection exposure apparatus and device manufacturing method using the same | — | 2001-05-15 |
| 5808724 | Illumination method and system having a first optical element at a position optically conjugate with an object and a second optical element closer to the object and on a pupil plane of the system | Hideki Ina | 1998-09-15 |
| 5793471 | Projection exposure method and apparatus in which scanning exposure is performed in accordance with a shot layout of mask patterns | Yuichi Yamada, Shigeyuki Uzawa | 1998-08-11 |
| 5140366 | Exposure apparatus with a function for controlling alignment by use of latent images | Takahisa Shiozawa, Akiyoshi Suzuki | 1992-08-18 |