Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8564891 | Holding apparatus, optical apparatus, and telescope | Kazuyuki Kasumi | 2013-10-22 |
| 8243378 | Holding apparatus, telescope, and optical apparatus | Yukio Takemura | 2012-08-14 |
| 7878665 | Holding apparatus for holding optical element above a base, exposure apparatus including the holding apparatus, and device manufacturing method using the exposure apparatus | — | 2011-02-01 |
| 7602564 | Optical element holding apparatus | Hirotoshi Torii | 2009-10-13 |
| 7525106 | Exposure apparatus, pressure control method for the same, and device manufacturing method | Shigeyuki Uzawa | 2009-04-28 |