Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11820068 | Imprint apparatus and article manufacturing method | — | 2023-11-21 |
| 11249394 | Imprint methods for forming a pattern of an imprint material on a substrate-side pattern region of a substrate by using a mold, and related device manufacturing methods | Tatusya Hayashi, Yosuke Murakami, Noriyasu Hasegawa, Yusuke Tanaka | 2022-02-15 |
| 11209731 | Imprint device and method for manufacturing article | — | 2021-12-28 |
| 10663858 | Imprint apparatus that forms a pattern of an imprint material on a substrate-side pattern region of a substrate using a mold, and related methods | Tatusya Hayashi, Yosuke Murakami, Noriyasu Hasegawa, Yusuke Tanaka | 2020-05-26 |
| 10042250 | Imprint apparatus, imprinting mold, and method of manufacturing article | Yusuke Tanaka | 2018-08-07 |
| 9841673 | Imprint apparatus and article manufacturing method | Yusuke Tanaka | 2017-12-12 |
| 9682510 | Imprint apparatus and method of manufacturing article | Yusuke Tanaka | 2017-06-20 |
| 9594301 | Imprint apparatus and article manufacturing method using same | Tatsuya Hayashi, Yosuke Murakami, Noriyasu Hasegawa, Yusuke Tanaka | 2017-03-14 |
| 9568819 | Holding apparatus, imprint apparatus and article manufacturing method using same | — | 2017-02-14 |
| 9280047 | Imprint apparatus and article manufacturing method | Yusuke Tanaka | 2016-03-08 |
| 8734702 | Original and article manufacturing method using same | Yusuke Tanaka | 2014-05-27 |
| 8603383 | Original and article manufacturing method using same | Yusuke Tanaka | 2013-12-10 |
| 7986471 | Optical element supporting device, lens barrel, exposure apparatus, and device manufacturing method | — | 2011-07-26 |
| 7602564 | Optical element holding apparatus | Kouhei Imoto | 2009-10-13 |
| 5983645 | Regenerator and cryogenic refrigerator having regenerator | Hiroyuki Morishita | 1999-11-16 |
| 5956956 | Cryogenic refrigerator | Hiroyuki Morishita | 1999-09-28 |