Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5751404 | Exposure apparatus and method wherein alignment is carried out by comparing marks which are incident on both reticle stage and wafer stage reference plates | Eiichi Murakami, Fumio Sakai, Shigeki Ogawa, Tetsuya Mori | 1998-05-12 |
| 5695897 | Alignment method and semiconductor exposure method | Noriyuki Mitome, Eiichi Murakami | 1997-12-09 |
| 5585925 | Alignment method | Makoto Sato | 1996-12-17 |
| 5543921 | Aligning method utilizing reliability weighting coefficients | Akiya Nakai, Masaaki Imaizumi, Hiroshi Tanaka, Noburu Takakura, Yoshio Kaneko | 1996-08-06 |
| 5499099 | Alignment method and alignment system | Makoto Sato | 1996-03-12 |