Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7986403 | Foreign substance inspection apparatus | — | 2011-07-26 |
| 7733471 | Foreign substance inspection apparatus | — | 2010-06-08 |
| 5790258 | Position detecting device | Hideki Ina | 1998-08-04 |
| 5695897 | Alignment method and semiconductor exposure method | Eiichi Murakami, Shigeyuki Uzawa | 1997-12-09 |
| 5172189 | Exposure apparatus | — | 1992-12-15 |
| 4901109 | Alignment and exposure apparatus | Hideki Ina | 1990-02-13 |